Through stack bridge bonding devices and associated methods

ABSTRACT

A semiconductor package including a package substrate with an upper surface, a controller, and a die stack. The controller and the die stack are at the upper surface. The die stack includes a shingled sub-stack of semiconductor dies, a reverse-shingled sub-stack of semiconductor dies, and a bridging chip. The bridging chip is bonded between the shingled sub-stack and the reverse-shingled sub-stack, and has an internal trace. A first wire segment is bonded between the controller and a first end of the bridging chip, and a second wire segment is bonded between a second end of the bridging chip and each semiconductor die of the shingled sub-stack. The internal trace electrically couples the first and second wire segments. Additionally, a third wire segment is bonded between the controller and each semiconductor die of the reverse-shingled sub-stack.

CROSS-REFERENCE TO RELATED APPLICATION(S)

This application contains subject matter related to a concurrently-filedU.S. patent application by Seng Kim Ye et al., titled “CROSS STACKBRIDGE BONDING DEVICES AND ASSOCIATED METHODS.” The related applicationis assigned to Micron Technology, Inc., and is identified by docketnumber 010829-9692.US00. The subject matter thereof is incorporatedherein by reference thereto.

TECHNICAL FIELD

The present disclosure is generally related to systems and methods forsemiconductor packages. In particular, the present technology relates tosemiconductor packages having bridge bonding structures.

BACKGROUND

Microelectronic devices, such as memory devices, microprocessors, andother electronics, may include one or more semiconductor packages withsemiconductor dies therein. The semiconductor packages includefunctional features, such as memory cells, processor circuits,interconnecting circuitry, etc. Semiconductor package manufacturers areunder increasing pressure to reduce the volume occupied by semiconductorpackages while increasing the capacity and/or speed of the resultingassemblies. To meet these demands, semiconductor package manufacturersoften stack multiple semiconductor dies vertically on top of each otherto increase the capacity or performance of the microelectronic deviceswithin the limited area inside the semiconductor packages or otherelement to which the semiconductor dies and/or assemblies are mounted.

One method semiconductor package manufacturers use to reducesemiconductor device assembly volume is stacking multiple semiconductordies vertically on top of each other in a shingled arrangement. Thismethod retains exposed surface area from each semiconductor die,allowing wire connections to extend directly from each semiconductor dieto the semiconductor package substrate. With each semiconductor die indirect connection with the semiconductor package substrate, overallcapacity and performance of semiconductor packages may increase overmicroelectronic devices having a similar footprint. This is limited,however, by manufacturing capability to interconnect semiconductor diesand, despite its efficient inclusion of semiconductor dies, stillpresents significant unused space.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a side view of a semiconductor package with die stacks.

FIG. 2 is a side view of a semiconductor package with die stacks havingcross stack bridge bonding, in accordance with some embodiments of thepresent technology.

FIG. 3 is a side view of a semiconductor package with die stacks havingcross stack bridge bonding, in accordance with some embodiments of thepresent technology.

FIGS. 4-8 illustrate a process for producing at least the semiconductorpackage of FIG. 2 , in accordance with some embodiments of the presenttechnology.

FIGS. 9-13 illustrate a process for producing at least the semiconductorpackage of FIG. 3 , in accordance with some embodiments of the presenttechnology.

FIG. 14 is a flow diagram illustrating a process for producing at leastthe semiconductor package of FIG. 2 , in accordance with someembodiments of the present technology.

FIG. 15 is a flow diagram illustrating a process for producing at leastthe semiconductor package of FIG. 3 , in accordance with someembodiments of the present technology.

The drawings have not necessarily been drawn to scale. Similarly, somecomponents and/or operations can be separated into different blocks orcombined into a single block for the purpose of discussion of some ofthe implementations of the present technology. Moreover, while thetechnology is amenable to various modifications and alternative forms,specific implementations have been shown by way of example in thedrawings and are described in detail below.

DETAILED OVERVIEW

The devices and methods of the present technology relate tosemiconductor packages having bridge bonding structures for improvingsemiconductor packages. For example, the devices and methods of thepresent technology may allow for more efficient use of space within asemiconductor package and fewer connections between dies and a substrateof the semiconductor package. These improvements allow at least for (i)reducing unoccupied space within the semiconductor package and anoverall semiconductor package footprint, (ii) reducing manufacturingcosts given the semiconductor package size reduction, (iii) balancingsignal integrity, (iv) preventing crosstalk between the front and backsides of the substrate, and (v) avoiding known and unknown manufacturingrisks associated with manufacturing large semiconductor packages.Further, when dies of the semiconductor packages include power andground connections via wirebond to a package substrate, thesemiconductor packages can have improved die concurrency.

Specifically, a semiconductor device package, and associated assembliesand methods, are disclosed herein. In at least one embodiment, thesemiconductor package includes a package substrate with an uppersurface, a controller, and a die stack. The controller and the die stackare at the upper surface. The die stack includes a shingled sub-stack ofsemiconductor dies, a reverse-shingled sub-stack of semiconductor dies,and a bridging chip. The bridging chip is bonded between the shingledsub-stack and the reverse-shingled sub-stack, and has an internal trace.A first wire segment is bonded between the controller and a first end ofthe bridging chip, and a second wire segment is bonded between a secondend of the bridging chip and each semiconductor die of the shingledsub-stack. The internal trace electrically couples the first and secondwire segments. Additionally, a third wire segment is bonded between thecontroller and each semiconductor die of the reverse-shingled sub-stack.

In at least one embodiment, the semiconductor device package includes apackage substrate with an upper surface, a controller, a shingled diestack, and a reverse-shingled die stack. The controller, the shingleddie stack, and the reverse-shingled die stack are at the upper surface.The shingled die stack includes multiple semiconductor dies, a firstbridging chip bonded to at least one of the semiconductor dies, a firstwire segment bonded between the controller and a first end of the firstbridging chip, and a second wire segment bonded between a second end ofthe first bridging chip and each semiconductor die of the shingled diestack. The reverse-shingled die stack includes multiple semiconductordies, a second bridging chip bonded to at least one of the semiconductordies, a third wire segment bonded between the controller and a first endof the second bridging chip, and a fourth wire segment bonded between asecond end of the second bridging chip and each semiconductor die of thereverse-shingled die stack.

The semiconductor package may be manufactured by providing a packagesubstrate having a controller and subsequently forming a shingled diestack and a reverse-shingled die stack, the die stacks having wirebonded between the die stacks and the controller. Forming the shingleddie stack at the package substrate can comprise bonding a first die tothe package substrate and consecutive dies to the first die with eachconsecutive die above and shingled relative to a previous die, andbonding the bridging chip to a last die of the consecutive dies of theshingled die stack. A first wire segment can be bonded between thecontroller and the first end of the bridging chip. A second wire segmentcan be bonded between the second end of the bridging chip, the first dieof the shingled die stack, and each consecutive die of the shingled diestack. Forming the reverse-shingled die stack can comprise bonding thesecond die to the bridging chip and bonding consecutive dies to thesecond die with each consecutive die above and reverse-shingled relativeto a previous die. A third wire segment can be bonded between thecontroller, the second die of the reverse-shingled die stack, and eachconsecutive die of the reverse-shingled die stack.

For ease of reference, the semiconductor package and the componentstherein are sometimes described herein with reference to top and bottom,upper and lower, upwards and downwards, and/or horizontal plane, x-yplane, vertical, or z-direction relative to the spatial orientation ofthe embodiments shown in the figures. It is to be understood, however,that the stacked semiconductor device and the components therein can bemoved to, and used in, different spatial orientations without changingthe structure and/or function of the disclosed embodiments of thepresent technology.

DESCRIPTION OF THE FIGURES

FIG. 1 is a side view of a semiconductor package 100 (the “package 100”)with die stacks 130, 140 known in the art. As illustrated, the package100 includes: (i) a package substrate 110 having connectors 112, (ii) acontroller 120, (iii) die stacks 130, 140 coupled to the packagesubstrate 110, each having multiple dies 150, and (iv) a mold material160 encasing the package 100. Each die stack 130, 140 has a shingledsub-stack including the bottom eight dies 150 of the respective diestack 130, 140 and a reverse-shingled sub-stack including the top eightdies 150 of the respective die stack 130, 140. Each of the sub-stacks,and the dies 150 therein, are wire bonded to the package substrate 110by the wires 132, 134, 142, 144. While the stacking, shingling, andreverse shingling of the dies 150 in the die stacks 130, 140 allows fora reduced semiconductor package footprint, the package 100 requires atleast four wires 132, 134, 142, 144 to connect the dies 150 with thepackage substrate 110. Further, the package 100 has (i) significantunutilized space above the controller 120 and between and around eachdie stack 130, 140, (ii) increased risk for manufacturing defectsassociated with large semiconductor packages (e.g., coplanarity issues,package warpage, or solider joint reliability), and (iii) increasedcomplexity associated with trace routing within the package substrate110.

FIGS. 2 and 3 are side views of semiconductor packages 200, 300 (the“packages 200, 300”) with die stacks (e.g., die stacks 230, 240, 330,340) having cross stack bridge bonding, in accordance with someembodiments of the present technology. More specifically, FIG. 2illustrates at least one embodiment of the present technology and FIG. 3illustrates at least another embodiment of the present technology.Aspects of the packages 200, 300 offer improved semiconductor structuraland performance efficiency by allowing circuits (e.g., the wire segments232 a and 232 b, 242 a and 242 b, 332 a and 332 b, and 342 a and 342 b)to continue on both a first and a second side of the die stacks.Specifically, a bridging chip (e.g., the bridging chips 236, 246, 336,346) in each die stack allows the circuits to continue on both the firstand second side of the die stacks. Further, by continuing circuits onboth sides of the die stacks, each die stack benefits from the ability(e.g., flexibility) to bond wires between die stacks. Continuingcircuits on both sides of the die stacks can allow for (i) balancingsignal integrity, (ii) preventing crosstalk between the first and backsides of the substrate, and (iii) when dies 250 of the semiconductorpackages 200, 300 include power and ground connections via wirebonds tothe package substrate 210, the semiconductor packages 200, 300 can haveimproved die concurrency.

By continuing the circuits on both sides of the die stacks, spaceoccupied by the die stacks may be used more efficiently and fewerconnections may be required between the die stacks and a packagesubstrate (e.g., package substrate 210), allowing the overall packagefootprint to be reduced. A reduced package footprint allows for reducingthe size of devices where the packages 200, 300 are used or theimplementation of additional packages 200, 300 within these devices. Forexample, the packages 200, 300 can provide an overall reduction inpackage footprint as compared to the package 100 of FIG. 1 between 20%and 45% (e.g., a reduction from between, roughly, 230 mm² and 320 mm² toless than 180 mm²). Further, the reduced package 200, 300 footprintallows at least for reducing manufacturing costs given the package sizereduction and avoiding known and unknown manufacturing risks associatedwith manufacturing large semiconductor packages.

For example, in the embodiment shown in FIG. 2 , the dies stacks 230,240 may nest within one another, reducing the footprint needed for thepackage substrate 210. As a further example in the embodiment shown inFIG. 3 , the die stacks 330, 340 may vertically overlap a controller220, similarly reducing the footprint needed for the package substrate210. Additionally, in both the embodiments shown in FIGS. 2 and 3 ,fewer connections are needed between the die stacks 230, 240, 330, 340and the package substrate 210, further reducing the footprint of theoverall package. For example, the embodiment of FIG. 2 may only have twoor fewer connections with the package substrate 210. Further, theembodiment of FIG. 3 may have no connections with the package substrate210, the die stacks 330, 340 instead connected directly with thecontroller 220. When the die stacks 330, 340 connect directly with thecontroller 220, otherwise necessary bond pads on the substrate 210 forelectrically connecting the die stacks 330, 340 with the substrate 210can be omitted. In these embodiments, die stacks 330, 340 (or one ormore of the dies 250 therein) can be closer to an edge of the substrate210 and allow for overall package size reduction. Similarly, when thedie stacks 330, 340 connect directly with the controller 220, if bondpads on the substrate 210 for electrically connecting the die stacks330, 340 with the substrate 210 are included but unused (e.g., whenusing a common substrate between multiple assemblies), wires can beomitted between the die stacks 330, 340 and the unused bond pads,conserving wire material.

Regarding the illustrated embodiment of FIG. 2 , the package 200includes: (i) a package substrate 210 having connectors 212; (ii) acontroller 220; (iii) the die stacks 230, 240 coupled to the packagesubstrate 210, each having multiple dies 250; (iv) bridging chips 236,246, each with a trace therein; (v) wire segments 232 a, 232 b, 242 a,242 b between the dies 250, the bridging chips 236, 246, and the packagesubstrate 210; and (vi) a mold material 260 encasing the die stacks 230,240, the bridging chips 236, 246, the wire segments 232 a, 232 b, 242 a,242 b, and the controller 220. The wire segments 232 a, 232 b togetherwith the trace within the bridging chip 236 may form a circuit 232; andthe wire segments 242 a, 242 b together with the trace within thebridging chip 246 may form a circuit 242. The dies 250 may be inelectric communication with the controller 220 via the circuits 232, 242and the package substrate 210. The dies 250 may further be in electriccommunication with elements outside the package 200, byway of thecircuits 232, 242 and the package substrate 210 or the controller 220,via the connectors 212.

The package substrate 210 may include an upper surface and a lowersurface opposite the upper surface. The controller 220 may be bonded tothe upper surface and in electric communication with the packagesubstrate 210. In some embodiments, the package 200 may instead excludethe controller 220. The package substrate 210 may include substrate bondpads on the upper and lower surfaces. The wires segments 232 a, 242 amay be bonded with the package substrate 210 at the bond pads on theupper surface. The connectors 212 (e.g., solder balls) may be bondedwith the package substrate 210 at the bond pads on the lower surface. Insome embodiments, the package substrate 210 can include conductive anddielectric materials, such as, for example, silicon, organic, ceramic,similar materials, or a combination thereof. In some embodiments, theconnectors 212 can be formed from a suitable conductive metal (or metalplating), such as copper, gold, silver, aluminum, tungsten, cobalt,nickel, or any other suitable conductive material formed using anadditive process, including, but not limited to, plating, depositing, orany other suitable method of manufacture for forming the connectors 212on the package substrate 210.

Each die stack 230, 240 may have a generally chevron outline allowingfor overlapping, nesting, or similar efficient structural arrangement ofadjacent die stacks 230, 240, reducing overall package footprint. Thechevron outline may be formed by a combination of shingled andreverse-shingled dies 250. Each die stack 230, 240 may include ashingled sub-stack having the bottom eight dies 250 of die stack 230,240, respectively. In the shingled sub-stacks, dies 250 may be stackedoffset from the previous die 250 in a first direction (e.g., to theleft, regarding FIG. 2 ), providing an exposed surface of each previousdie 250. Each die stack 230, 240 may also include a reverse-shingledsub-stack having the top eight dies 250 of the die stack 230, 240,respectively. In the reverse-shingled sub-stacks, dies 250 may bestacked offset from the previous die 250 in a second direction (e.g., tothe right, regarding FIG. 2 ), similarly providing an exposed surface ofeach previous die 250. Each die 250 may include a bond pad at theexposed surface for connecting with the wire segments 232 a, 232 b, 242a, 242 b, respectively as illustrated in FIG. 2 .

In some embodiments, the package 200 may include one or more additionaldie stacks or a single die stack generally corresponding with the diestacks 230, 240. Relative to FIG. 2 , additional die stacks may beincluded to the right or left of the die stacks 230, 240 or may beincluded in front of or behind the die stacks 230, 240 (i.e., into orout of FIG. 2 ). In some embodiments, either or both of the die stacks230, 240, or the sub-stacks therein, may include additional or fewerdies 250. For example, the die stacks 230, 240 may include fewer or morethan sixteen dies 250 or the sub-stacks may include fewer or more thaneight dies 250. In some embodiments, the die stacks 230, 240 may includeadditional or fewer sub-stacks, or may include multiple sub-stacks ofthe same orientation.

The dies 250 may each be a semiconductor die and, in variousembodiments, may correspond with a memory die, a logic die, a controllerdie, or any other suitable kind of semiconductor die. Although only onebond pad and one wire segment 232 a, 232 b, 242 a, 242 b are visible foreach die 250 as shown in the side view of FIG. 2 , in some embodiments,each die 250 can further include multiple bond pads for connecting withadditional wire segments or circuits, variously dedicated to signaling,power, ground, or another similar purpose. Further, in some embodiments,each wire segment 232 a, 232 b, 242 a, 242 b can include multiplesub-segments combine to constitute a single wire segment.

Each die stack 230, 240 may include one of the bridging chips 236, 246.The bridging chips 236, 246, in part, allow the circuits 232, 242 tocontinue on both the first and the second side of each of the die stacks230, 240, respectively. Further, the bridging chips 236, 246 may allowadditional circuits to continue on both the first and the second side ofeach of the die stacks 230, 240. For each circuit passing through thebridging chips 236, 246, the bridging chips 236, 246 may include a firstend bond pad, a second end bond pad, and an electric connection (e.g., atrace) between the first and second end bond pads extending through thebridging chip 236, 246. The first and the second ends of the bridgingchips 236, 246 may correspond with the first and the second sides ofeach die stack 230, 240, respectively. The first side of each die stack230, 240 may be the side away from the controller 220 and the secondside may be the side closest to the controller 220. The bridging chip236 may be bonded to the top of the reverse-shingled sub-stack of thedie stack 230. The bridging chip 246 may be bonded between the shingledsub-stack and the reverse-shingled sub-stack of the die stack 240.

In some embodiments, one or both of the dies stacks 230, 240 may includeadditional bridging chips 236, 246. Further, the bridging chips 236, 246or additional bridging chips may be bonded between dies 250 within theshingled sub-stack or the reverse-shingled sub-stack. In someembodiments, the bridging chips 236, 246 may include conductive anddielectric materials, such as, for example, silicon, organic, ceramic,similar materials, or a combination thereof. In other embodiments, thebridging chips 236, 246 may correspond in construction and material withthe package substrate 210, the controller 220, or one or more of thedies 250.

The dies 250 of each die stack 230, 240 may be in electric communicationwith other dies 250, the bridging chips 236, 246, the package substrate210, or the controller 220 via connections with the circuits 232, 242.The circuits 232, 242, and the dies 250 connected thereto, maycorrespond with controller channels of the controller 220. For example,a controller channel 0 (the “first channel 270”) may correspond with thecircuit 232 and a controller channel 1 (the “second channel 275”) maycorrespond with the circuit 242. The first channel 270 may include thedies 250 within the reverse-shingled sub-stacks of the die stacks 230,240 (i.e., the top eight dies 250 of each die stack 230, 240) and thesecond channel 275 may include the dies 250 within the shingledsub-stacks of the die stacks 230, 240 (i.e., the bottom eight dies 250of each die stack 230, 240). In some embodiments, the first channel 270and the second channel 275 may be reversed. Further, if the package 200may include one or more additional channels.

Regarding the first channel 270, the circuit 232 may connect the packagesubstrate 210, the corresponding dies 250 of the die stacks 230, 240,and the bridging chip 236. Specifically, the wire segment 232 a may be(i) bonded to the package substrate 210 at one of the bond pads on theupper surface of the package substrate 210, (ii) bonded to each of thedies 250 at the respective bond pad on the exposed surface, and (iii)bonded to the bridging chip 236 at the first end bond pad; and the wiresegment 232 b may be (i) bonded to the bridging chip 236 at the secondend bond pad, and (ii) bonded to each of the dies 250 at the respectivebond pad on the exposed surface (i.e., bridge bonding between the diestacks 230, 240). By connecting the package substrate 210, thecorresponding dies 250 of the die stacks 230, 240, and the bridging chip236, the circuit 232, byway of the trace within the bridging chip 236,allows for electric communication therebetween. Although wire segment232 a is illustrated as being bonded between the package substrate 210and a lowermost die of the reverse-shingled sub-stack of the die stack230 on the left side of the die stack 230, this portion of the wiresegment 232 a may be excluded and an additional wire segment may beincluded bonded between a bond pad on the upper surface of an uppermostdie 250 of the die stack 240 and a bond pad on the upper surface of thepackage substrate 210 on the right side of the die stack 240.

Regarding the second channel 275, the circuit 242 may connect thepackage substrate 210, the corresponding dies 250 of the die stacks 230,240, and the bridging chip 246. Specifically, the wire segment 242 a maybe (i) bonded to the package substrate 210 at one of the bond pads onthe upper surface of the package substrate 210, (ii) bonded to each ofthe dies 250 at the respective bond pad on the exposed surface, and(iii) bonded to the bridging chip 246 at the first end bond pad; and thewire segment 242 b may be (i) bonded to the bridging chip 246 at thesecond end bond pad, and (ii) bonded to each of the dies 250 at therespective bond pad on the exposed surface (i.e., bridge bonding betweenthe die stacks 230, 240). By connecting the package substrate 210, thecorresponding dies 250 of the die stacks 230, 240, and the bridging chip246, the circuit 242, byway of the trace within the bridging chip 246,allows for electric communication therebetween. Although wire segment242 a is illustrated as being bonded between the package substrate 210and a lowermost die of the die stack 240 on the right side of the diestack 240, this portion of the wire segment 242 a may be excluded and anadditional portion of wire segment 242 b may be included bonded betweena bond pad on the upper surface of a lowermost die 250 of the die stack230 and a bond pad on the upper surface of the package substrate 210 onthe right side of the die stack 230.

Regarding the illustrated embodiment of FIG. 3 , the package 300includes: (i) the package substrate 210 having connectors 212; (ii) thecontroller 220; (iii) the die stacks 330, 340 coupled to the packagesubstrate 210, each having the multiple dies 250; (iv) bridging chips336, 346, each with a trace therein; (v) wire segments 332 a, 332 b, 342a, 342 b between the dies 250, the bridging chips 336, 346, and thecontroller 220; (vi) wires 334, 344 between the dies 250 and thecontroller 220; and (vii) a mold material 360 encasing the die stacks330, 340, the bridging chips 336, 346, the wire segments 332 a, 332 b,342 a, 342 b, the wires 334, 344, and the controller 220. The wiresegments 332 a, 332 b together with the trace within the bridging chip336 may form a circuit 332; and the wire segments 342 a, 342 b togetherwith the trace within the bridging chip 346 may form a circuit 342. Thedies 250 may be in electric communication with the package substrate 210via the controller 220 and the circuits 332, 342 or the wires 334, 344.The dies 250 may further be in electric communication with elementsoutside the package 300, byway of the circuits 332, 342 or the wires334, 344, the controller 220, and the package substrate 210 via theconnectors 212. In some embodiments, each wire segment 332 a, 332 b, 342a, 342 b can include multiple sub-segments combine to constitute asingle wire segment.

The package substrate 210, the connectors 212, the controller 220, andthe dies 250 of the embodiment of FIG. 3 may include all, some, orsimilar elements and may be similarly bonded together, like the packagesubstrate 210, the connectors 212, the controller 220, and the dies 250of the embodiment of FIG. 2 , respectively. Regarding at least theembodiment of FIG. 3 , however, the controller 220 may include an uppersurface with bond pads thereon and the package substrate 210 may notinclude the bond pads on the upper surface of the package substrate 210.The wire segments 332 a, 342 a and wires 334, 344, therefore, mayinstead be bonded to and in electric communication with the controller220. In some embodiments, the controller 220 may be excluded. In theseembodiments, the package substrate 210 has bond pads on the uppersurface that may be bonded with the wire segments 332 a, 342 a and thewires 334, 344. Although only one bond pad, one circuit 332, 342, andone wire 334, 344 are visible for each die 250 as shown in the side viewof FIG. 3 , in some embodiments, each die 250 can further includemultiple bond pads for connecting with additional wire segments,circuits, or wires, variously dedicated to signaling, power, ground, oranother similar purpose.

Each die stack 330, 340 may have a generally chevron outline allowingfor overlapping, nesting, or similar efficient structural arrangement ofadjacent die stacks 330, 340, reducing the overall package footprint.The chevron outline may be formed by a combination of shingled andreverse-shingled dies 250. The die stack 330 may include areverse-shingled sub-stack having the bottom eight dies 250 of the diestack 330 and may also include a shingled sub-stack having the top eightdies 250 of the die stack 330. The die stack 340 may include a shingledsub-stack having the bottom eight dies 250 of the die stack 340 and mayalso include a reverse-shingled sub-stack having the top eight dies 250of the die stack 340. In the shingled sub-stacks, dies 250 may bestacked offset from the previous die 250 in a first direction (e.g., tothe left, regarding FIG. 3 ), providing an exposed surface of eachprevious die 250. In the reverse-shingled sub-stacks, dies 250 may bestacked offset from the previous die 250 in a second direction (e.g., tothe right, regarding FIG. 3 ), similarly providing an exposed surface ofeach previous die 250. Each die 250 may include a bond pad at theexposed surface for connecting with at least one of the circuits 332,342 or wires 334, 344, respectively as illustrated in FIG. 3 .

In some embodiments, the package 300 may include one or more additionaldie stacks generally corresponding with the die stacks 330, 340.Relative to FIG. 3 , the additional die stacks may be included to theright or left of the die stacks 330, 340 or may be included in front ofor behind the die stacks 330, 340 (i.e., into or out of FIG. 3 ). Insome embodiments, either or both of the die stacks 330, 340, or thesub-stacks therein, may include additional or fewer dies 250. Forexample, the die stacks 330, 340 may include fewer or more than sixteendies 250 or the sub-stacks may include fewer or more than eight dies250.

Each die stack 330, 340 may include one of the bridging chips 336, 346.The bridging chips 336, 346, in part, allow the circuits 332, 342 tocontinue on both the first and the second side of each die stack 330,340, respectively. Further, the bridging chips 336, 346 may allowadditional circuits to continue on both the first and the second side ofeach of the die stack 330, 340. For each circuit passing through thebridging chips 336, 346, the bridging chips 336, 346 may include a firstend bond pad, a second end bond pad, and an electric connection (e.g., atrace) between the first and second end bond pads extending through thebridging chip 336, 346. The first and the second ends of the bridgingchips 336, 346 may correspond with the first and the second sides ofeach die stack 330, 340, respectively. The first side of each die stack330, 340 may be the side away from the controller 220 and the secondside may be the side closest to the controller 220. The bridging chip336 may be bonded between the reverse-shingled sub-stack and theshingled sub-stack of the dies stack 330. The bridging chip 246 may bebonded between the shingled sub-stack and the reverse-shingled sub-stackof the die stack 240.

In some embodiments, one or both of the dies stacks 330, 340 may includeadditional bridging chips 336, 346. Further, the bridging chips 336, 346or additional bridging chips may be bonded between dies 250 within theshingled sub-stack or the reverse-shingled sub-stack. In someembodiments, the bridging chips 336, 346 may include conductive anddielectric materials, such as, for example, silicon, organic, ceramic,similar materials, or a combination thereof. In other embodiments, thebridging chips 336, 346 may correspond in construction and material withthe package substrate 210, the controller 220, or one or more of thedies 250.

The dies 250 of each die stack 330, 340 may be in electric communicationwith other dies 250, the bridging chips 336, 346, the package substrate210, or the controller 220 via connections with the circuits 332, 342 orwires 334, 344. The circuits 332, 342 or wires 334, 344 and the dies 250connected thereto, may correspond with controller channels of thecontroller 220. For example, a controller channel 0 (the “first channel370”) may correspond with the circuit 332, a controller channel 1 (the“second channel 372”) may correspond with the circuit 342, a controllerchannel 2 (the “third channel 374”) may correspond with the wire 334,and a controller channel 3 (the “fourth channel 376”) may correspondwith the wire 344. The first channel 370 may include the dies 250 withinthe reverse-shingled sub-stack of the die stack 330 (e.g., the bottomeight dies 250 of the die stack 330), the second channel 372 may includethe dies 250 within the shingled sub-stack of the die stack 340 (e.g.,the bottom eight dies 250 of the die stack 340), the third channel 374may include the dies 250 within the shingled sub-stack of the die stack330 (e.g., the top eight dies 250 of the die stack 330), and the fourthchannel 376 may include the dies 250 within the reverse-shingledsub-stack of the die stack 340 (e.g., the top eight dies 250 of the diestack 340). In some embodiments, one or more of the first channel 370,the second channel 372, the third channel 374, or the fourth channel 376may be reordered or combine, either in-part or in-whole. Further, if thepackage 300 may include one or more additional channels.

Regarding the first channel 370, the circuit 332 may connect thecontroller 220, the corresponding dies 250 of the die stack 330, and thebridging chip 336. Specifically, the wire segment 332 a may be (i)bonded to the controller 220 at one of the bond pads on the uppersurface of the controller 220, and (ii) bonded to the bridging chip 336at the second end bond pad; and the wire segment 332 b may be (i) bondedto the bridging chip 336 at the first end bond pad, and (ii) bonded toeach of the dies 250 at the respective bond pad on the exposed surface(i.e., bridge bonding through die stack 330). By connecting thecontroller 220, the corresponding dies 250 of the die stack 330, and thebridging chip 336, the circuit 332, byway of the trace within thebridging chip 336, allows for electric communication therebetween.

Regarding the second channel 372, the circuit 342 may connect thecontroller 220, the corresponding dies 250 of the die stack 340, and thebridging chip 346. Specifically, the wire segment 342 a may be (i)bonded to the controller 220 at one of the bond pads on the uppersurface of the controller 220, and (ii) bonded to the bridging chip 346at the second end bond pad; and the wire segment 342 b may be (i) bondedto the bridging chip 346 at the first end bond pad, and (ii) bonded toeach of the dies 250 at the respective bond pad on the exposed surface(i.e., bridge bonding through die stack 340). By connecting thecontroller 220, the corresponding dies 250 of the die stack 340, and thebridging chip 346, the circuit 342, byway of the trace within thebridging chip 346, allows for electric communication therebetween.

Regarding the third channel 374 and the fourth channel 376, the wire 334and the wire 344, respectively, may connect the controller 220 and thecorresponding dies 250 of the die stacks 330, 340. Specifically, thewire 334 may be bonded to the controller 220 at one of the bond pads onthe upper surface of the controller 220 and bonded to each of the dies250 at the respective bond pad on the exposed surface; and the wire 344may be bonded to the controller 220 at one of the bond pads on the uppersurface of the controller 220 and bonded to each of the dies 250 at therespective bond pad on the exposed surface. By connecting the controller220 and the corresponding dies 250 of the die stacks 330, 340, the wires334, 344 allow for electric communication therebetween.

In some embodiments, the package 300 may include one or more additionaldedicated wires connected (i) from the package substrate 210 to one ormore of the dies 250, (ii) from the package substrate 210 to thecontroller 220, (iii) from the controller 220 to one or more of thebridging chips 336, 346, or (iv) from the controller 220 to one or moreof the dies 250 to form a dedicated circuit. The dedicated circuits maybe dedicated to signaling, power, ground, or another similar purposebetween dies 250 of one or more die stacks 330, 340. When the dedicatedcircuit is included, the package substrate 210 or controller 220 mayinclude one or more additional bond pads on the upper surface. Theadditional bond pads on the package substrate 210 may be adjacent to oneor both of the dies 250 bonded to the package substrate 210 and oppositethe controller 220, or may be adjacent to the controller 220. Thebridging chips 336, 346 may include a dedicated first end bond pad, adedicated second end bond pad, and an electric connection (e.g., trace)therebetween specific to each dedicated circuit.

When the dedicated circuit is included with, for example, the die stack330, a first dedicated wire segment may be (i) bonded to the bond pad onthe upper surface of the package substrate 210, (ii) bonded to each dies250 of the reverse-shingled sub-stack at a dedicated bond pad on theexposed surface, and (iii) bonded to a dedicated first end bond pad ofthe bridging chip 336, and a second dedicated wire segment may be (i)bonded to a dedicated second end bond pad of the bridging chip 336 and(ii) bonded to each die 250 of the shingled sub-stack at a dedicatedbonded pad on the exposed surface. By connecting the package substrate210, the corresponding dies 250 of the die stack 330, and the bridgingchip 336, the dedicated circuit, byway of the trace within the bridgingchip 336, allows for dedicated electric communication therebetween,bypassing the controller 220. A similar dedicated circuit may instead oralso be included with the die stack 340 with similar bond connectionsbetween the package substrate 210, the dies 250, and the bridging chip346.

In some embodiments, a dedicated circuit can also be connected with thecontroller 220. For example, a wire segment may extend (i) from the bondpad on the upper surface of the package substrate 210 to the controller,(ii) from the controller 220 to the second end bond pad of the bridgingchip 336, (iii) from the second end bond pad of the bridging chip 336 toeach die 250 in the top of the die stacks 330, and (iii) from the firstend bond pad of the bridging chip 336 to each die 250 in the bottom ofthe die stacks 330. Likewise, a dedicated wire may instead or also beincluded with the die stack 340 with similar bond connections betweenthe package substrate 210, the dies 250, and the bridging chip 346.

Further examples of the present technology may include semiconductorpackages with a different number of die stacks, sub-stacks, or bridgingchips. As a first example, a semiconductor package may include at leasta first and a second die stack comprising one sub-stack each and abridging chip bonded to the top of the first die stack (similar to theillustration of FIG. 5 ). A circuit may be established using a firstwire segment bonded to (i) the package substrate 210, (ii) each of thedies 250 in the first die stack, and (iii) the first end pad of thebridging chip, and a second wire segment bonded to (i) the second endpad of the bridging chip and (ii) each of the dies 250 in the second diestack.

Additional die stacks may be laterally added to the examplesemiconductor package and may be combine with the circuit by anadditional bridging chip bonded to the preceding die stack (e.g., thesecond die stack in the present example). To include additional lateralsub-stacks, a first additional wire segment may be bonded to (i) thesecond end pad of the bridging chip or the uppermost die 250 of thepreceding die stack and (ii) the second end pad of the additionalbridging chip, and a second additional wire segment may be bonded to (i)the first end pad of the additional bridging chip and (ii) each of thedies 250 in the additional die stack. All sub-stacks of the presentexample semiconductor package may be either shingled orreverse-shingled.

As a second example, a semiconductor package may include a single diestack comprising a bottom and a top sub-stack separated by a bridgingchip (similar to sub-stacks 500, 600 of FIG. 6 , or sub-stacks 1000,1100 of FIG. 11 ). A lowermost die 250 of the top sub-stack may beoffset in the first direction from the first end of the bridging chipand offset in the second direction from the second end of the bridgingchip (e.g., the lowermost die 250 may be offset from both ends of thebridging chip or generally centered on the bridging chip). A circuit maybe established using a first wire segment bonded to (i) the packagesubstrate 210, (ii) each of the dies 250 in the bottom die stack, and(iii) the first end pad of the bridging chip, and a second wire segmentbonded to (i) the second end pad of the bridging chip and (ii) each ofthe dies 250 in the top die stack.

Additional sub-stacks may be vertically added to the examplesemiconductor package and may be combine with the circuit by anadditional bridging chip bonded to the preceding sub-stack (e.g., thetop die stack in the present example). To include additional verticalsub-stacks, a first additional wire segment may be bonded to (i) theuppermost die of the preceding sub-stack and (ii) the first die end ofthe additional bridging chip, and a second additional wire segment maybe bonded to (i) the second end pad of the additional bridging chip and(ii) each of the dies 250 in the additional sub-stack. All sub-stacks ofthe present example semiconductor package alternate between shingled orreverse-shingled. Further, portions or all of the first and secondexamples, or other embodiments herein, may be combine to establish asemiconductor package having varying die stack structures and circuitstherein.

As a third example, a semiconductor package may include a packagesubstrate (e.g., the package substrate 210), a first die stack and asecond die stack (e.g., the die stacks 230, 240 of FIG. 2 ) coupled tothe package substrate, wherein each of the first and the second diestack have multiple dies (e.g., the dies 250 of FIG. 2 ) and at leastone bridging chip (e.g., the bridging chips 236, 246 of FIG. 2 ). Eachbridging chip may include a first exposed portion on a first end and asecond exposed portion on a second end, wherein each bridging chip canbe electrically connected, by a wire segment, with at least some dies ofthe first die stack at the first exposed portion, and wherein eachbridging chip can be electrically connected, by a wire segment, with atleast some of the dies of the second die stack at the second exposedportion, thereby forming a circuit across die stacks associated witheach bridging chip, respectively. By incorporating circuits across thedie stacks using the bridging chips, the die stacks can be nested withinone another and significantly reduce the overall footprint of thesemiconductor package (e.g., a reduction of 20-45% over conventionalsemiconductor packages, such as the package 100 of FIG. 1 ). Further,signal integrity of the semiconductor package, overall, can be improved.

Further, in some embodiments of the third example, the bridging chip ofthe first die stack (e.g., the die stack 240 of FIG. 2 ) can bevertically aligned with at least an uppermost and a lowermost die of thesecond die stack (e.g., die stack 230 of FIG. 2 ). In thisconfiguration, the first die stack is nested within the second die stackand therefore the overall footprint of the semiconductor package can bereduced.

As a fourth example, a semiconductor package may include a packagesubstrate (e.g., the package substrate 210 of FIG. 3 ) and a first diestack (e.g., the die stack 340 of FIG. 3 ), wherein the first die stackincludes multiple dies (e.g., the dies 250 of FIG. 3 ) and a firstbridging chip (e.g., the bridging chip 346 of FIG. 3 ). The firstbridging chip may include a first exposed portion on a first end and asecond exposed portion on a second end, wherein the first bridging chipcan be electrically connected, by a wire segment, with the dies of abottom portion of the first die stack at the first exposed portion, andwherein the first bridging chip can be electrically connected, by a wiresegment, with a controller (e.g., the controller 220 of FIG. 3 ) at thesecond exposed portion, thereby forming a circuit including the dies ofthe bottom portion of the first die stack. The dies of a top portion ofthe first die stack can similarly form a circuit by electricallyconnecting each of the dies directly to the controller. By incorporatingmultiple circuits in a single die stack in direct connection with thecontroller, the semiconductor package can benefit from more balancedsignal integrity.

Further, in some embodiments of the fourth example, the controller canbe at least partially nested under the bottom portion of the first diestack. For example, a portion of the first bridging chip can bevertically aligned with the controller. By nesting the controller undera portion of the first die stack the overall footprint of thesemiconductor package can be reduced, contributing to an overall packagesize reduction of 20-45%, in some embodiments versus, conventionalsemiconductor packages.

Further, in some embodiments of the fourth example, a portion of anupper surface of the package substrate opposite the controller from thefirst die stack can be free of any bond pad or free of any bond pads towhich a wire segment is bonded. That is, for example, no connection bywire segment is made between the bottom portion of the first die stackand the package substrate, opposite the first die stack from thecontroller. By excluding connections between the first die stack and thepackage substrate opposite the controller, a distance between the firstdie stack and an edge of the package substrate can be reduced, therebyallowing the overall footprint of the semiconductor package to bereduced, contributing to an overall package size reduction of 20-45%, insome embodiments, over conventional semiconductor packages.

FIGS. 4-8 illustrate a process for producing at least the package 200 ofFIG. 2 having cross stack bridge bonding in accordance with someembodiments of the present technology. The process may generally includepreparing the package substrate 210 and forming the sub-stacks of thedies stacks 230, 240 in a counter clockwise order. For example, thesub-stacks can be formed in the following order: the shingled sub-stack(FIG. 4, 400 ), the shingled sub-stack (FIG. 5, 500 ), thereverse-shingled sub-stack (FIG. 6, 600 ), and the reverse-shingledsub-stack (FIG. 7, 700 ). More specifically, the process may include:(i) preparing the package substrate 210, (ii) bonding the shingledsub-stack (FIG. 4, 400 ) of the die stack 230 (FIG. 2 ) to the packagesubstrate 210, (iii) bonding the wire segment 242 b to each of the dies250 in the shingled sub-stack 400, (iv) bonding the shingled sub-stack(FIG. 5, 500 ) of the die stack 240 (FIG. 2 ) to the package substrate210, (v) bonding the wire segment 242 a from the package substrate 210to each of the dies 250 and the bridging chip 246 in the shingledsub-stack 500, and extending the wire segment 242 b from the shingledsub-stack 400 to the bridging chip 246, (vi) bonding thereverse-shingled sub-stack (FIG. 6, 600 ) of the die stack 240 to thebridging chip 246, (vii) bonding the wire segment 232 b to each die 250of the reverse-shingled sub-stack 600, (viii) bonding thereverse-shingled sub-stack (FIG. 7, 700 ) of the die stack 230 to thetop die of the shingled sub-stack 400, (ix) bonding the wire segment 232a from the package substrate 210 to each of the dies 250 and thebridging chip 236 in the reverse-shingled shingled sub-stack 700, andextending the wire segment 232 b from the reverse-shingled sub-stack 600to the bridging chip 236, and (x) adding a molding material over thepackage 200 to form the mold material 260.

FIG. 4 illustrates the package 200 after (i) preparing the packagesubstrate 210, (ii) bonding the shingled sub-stack 400 of the die stack230 (FIG. 2 ) to the package substrate 210, and (iii) bonding the wiresegment 242 b to each of the dies 250 in the shingled sub-stack 400.Preparing the package substrate 210 may include bonding the connectors212 to the package substrate 210 at the bond pads on the lower surfaceof the package substrate 210 and bonding the controller 220 to the uppersurface of the package substrate 210. Bonding the shingled sub-stack 400to the package substrate 210 may first include bonding a lowermost die250 (e.g., a bottom or first die) to the upper surface of the packagesubstrate 210 adjacent to the controller 220. Next, the dies 250 may beconsecutively bonded to the shingled sub-stack 400 offset from thelowermost or a previous die 250 in the first direction, exposing thebond pad of the lowermost or the previous die 250. After all dies 250have been bonded to the package 200, forming the shingled sub-stack 400,the wire segment 242 b may be formed, connecting the bond pads of eachdie 250 of the sub-stack 400.

FIG. 5 illustrates the package 200 after (i) bonding the shingledsub-stack 500 of the die stack 240 (FIG. 2 ) to the package substrate210, (ii) bonding the wire segment 242 a from the package substrate 210to each of the dies 250 and the bridging chip 246 in the shingledsub-stack 500, and (iii) extending the wire segment 242 b from theshingled sub-stack 400 to the bridging chip 246. Bonding the shingledsub-stack 500 to the package substrate 210 may first include bonding alowermost die 250 (e.g., a bottom or first die) to the upper surface ofthe package substrate 210 adjacent to the controller 220 and oppositethe shingled sub-stack 400. Next, the dies 250 may be consecutivelybonded to the shingled sub-stack 500 offset from the lowermost or aprevious die 250 in the first direction, exposing the bond pad of thelowermost or the previous die 250.

After all dies 250 of the sub-stack 500 have been bonded to the package200, the bridging chip 246 may be bonded to an uppermost die 250 (e.g.,a top or last die) offset from the uppermost die 250 in the firstdirection and exposing the bond pad of the uppermost die 250. After thebridging chip 246 has been bonded to the uppermost die 250, forming theshingled sub-stack 500, the wire segment 242 a may be formed. The wiresegment 242 a may connect one of the bond pads on the upper surface ofthe package substrate 210 with the bond pad of each die 250 of theshingled sub-stack 500 and the bond pad on the first end of the bridgingchip 246. Further, the wire segment 242 b may be extended to connect thebond pad of an uppermost die 250 of the shingled sub-stack 400 with thebond pad on the second end of the bridging chip 246, completing thecircuit 242.

FIG. 6 illustrates the package 200 after bonding the reverse-shingledsub-stack 600 of the die stack 240 to the bridging chip 246 and bondingthe wire segment 232 b to each die 250 of the reverse-shingled sub-stack600. Bonding the reverse-shingled sub-stack 600 to the bridging chip 246may first include bonding a lowermost die 250 (e.g., a bottom or firstdie) to the upper surface of the bridging chip 246. The lowermost die250 may be offset in the first direction from the first end of thebridging chip 246 and offset in the second direction from the second endof the bridging chip 246 (e.g., the lowermost die 250 may be offset fromboth ends of the bridging chip 246 or generally centered on the bridgingchip 246). Next, the dies 250 may be consecutively bonded to thereverse-shingled sub-stack 600 offset from the lowermost or a previousdie 250 in the second direction, exposing the bond pad of the lowermostor the previous die 250. After all dies 250 have been bonded to thepackage 200, forming the reverse-shingled sub-stack 600, the wiresegment 232 b may be formed, connecting the bond pads of each die 250 ofthe reverse-shingled sub-stack 600.

FIG. 7 illustrates the package 200 after (i) bonding thereverse-shingled sub-stack 700 of the die stack 230 to the top die ofthe shingled sub-stack 400, (ii) bonding the wire segment 232 a from thepackage substrate 210 to each of the dies 250 and the bridging chip 236in the reverse-shingled shingled sub-stack 700, and (iii) extending thewire segment 232 b from the reverse-shingled sub-stack 600 to thebridging chip 236. Bonding the reverse-shingled sub-stack 700 to the topdie of the shingled sub-stack 400 may include bonding a lowermost die250 (e.g., a bottom or first die) to the upper surface of the top die ofthe shingled sub-stack 400. The lowermost die 250 of thereverse-shingled shingled sub-stack 700 may be offset in the firstdirection from the top die of the shingled sub-stack 400. Next, the dies250 may be consecutively bonded to the reverse-shingled sub-stack 700offset from the lowermost or a previous die 250 in the second direction,exposing the bond pad of the lowermost or the previous die 250.

After all dies 250 have been bonded to the package 200, the bridgingchip 236 may be bonded to an uppermost die 250 (e.g., a top or last die)offset from the uppermost die 250 in the second direction and exposingthe bond pad of the uppermost die 250. After the bridging chip 236 hasbeen bonded to the uppermost die 250, forming the reverse-shingledsub-stack 700, the wire segment 232 a may be formed. The wire segment232 a may connect one of the bond pads on the upper surface of thepackage substrate 210 with the bond pad of each die 250 of the sub-stack700 and the bond pad on the first end of the bridging chip 246. Further,the wire segment 232 b may be extended to connect the bond pad on anuppermost die 250 of the reverse-shingled sub-stack 600 with the bondpad on the second end of the bridging chip 236, completing the circuit232.

FIG. 8 illustrates the package 200 after a molding material has beenapplied over the controller 220 and die stacks 230, 240. The moldingmaterial may be formed by dipping the package 200, die stacks 230, 240first, into a liquid molding material, removing the package 200 from theliquid molding material, and allowing the material to harden. In someembodiments the molding material may be applied over the package 200while the package 200 is upright (as shown in FIG. 8 ). As illustrated,the molding material encases and insulates the upper surface of thepackage substrate 210 and exterior surfaces of the controller 220 andthe dies 250.

FIGS. 9-13 illustrate a process for producing at least the package 300of FIG. 3 having through-stack bridge bonding in accordance with someembodiments of the present technology. The process may generally includepreparing the package substrate 210 and forming the sub-stacks of thedies stacks 330, 340 in a counter clockwise order. For example, thesub-stacks can be formed in the following order: the reverse-shingledsub-stack (FIG. 9, 900 ), the shingled sub-stack (FIG. 10, 1000 ), thereverse-shingled sub-stack (FIG. 11, 1100 ), and the shingled sub-stack(FIG. 12, 1200 ). In some embodiments, the process may instead includeforming the sub-stacks in a clockwise order (e.g., starting with theshingled sub-stack (FIG. 10, 1000 ) and ending with the reverse-shingledsub-stack (FIG. 11, 1100 )). In some embodiments the process may insteadinclude forming the sub-stacks in a “Z” order (e.g., the shingledsub-stack (FIG. 10, 1000 ), the reverse-shingled sub-stack (FIG. 11,1100 ), the reverse-shingled sub-stack (FIG. 9, 900 ), and then theshingled sub-stack (FIG. 12, 1200 ). In some embodiments, the processmay instead include forming the die stack 430, followed by forming thedie stack 440. In further embodiments still, each of the die stacks 430,440, excluding the wire segments 332 a, 332 b, 334, 342 a, 342 b, 344,can be formed off the package substrate 210 and placed on the packagesubstrate. Then, the wire segments 332 a, 332 b, 334, 342 a, 342 b, 344can be connected to the assembly.

In the illustrated process of FIGS. 9-13 the process may specificallyinclude: (i) preparing the package substrate 210, (ii) bonding thereverse-shingled sub-stack (FIG. 9, 900 ) of the die stack 330 (FIG. 3 )to the package substrate 210, (iii) bonding the wire segment 332 a tothe controller 220 and to the bridging chip 336, (iv) bonding the wiresegment 332 b to each of the dies 250 in the reverse-shingled sub-stack900 and to the bridging chip 336, (v) bonding the shingled sub-stack(FIG. 10, 1000 ) of the die stack 340 (FIG. 3 ) to the package substrate210, (vi) bonding the wire segment 342 a to the controller 220 and tothe bridging chip 346, (vii) bonding the wire segment 342 b to each ofthe dies 250 in the shingled sub-stack 1000 and to the bridging chip346, (viii) bonding the shingled sub-stack (FIG. 11, 1100 ) of the diestack 340 to the bridging chip 346, (ix) bonding the wire 344 to eachdie 250 of the reverse-shingled sub-stack 1100 and to the controller220, (x) bonding the shingled sub-stack (FIG. 12, 1200 ) of the diestack 330 to the bridging chip 336, (xi) bonding the wire 334 to eachdie 250 of the shingled sub-stack 1200 and to the controller 220, and(x) adding a molding material over the package 300 to form the moldmaterial 360.

FIG. 9 illustrates the package 300 after (i) preparing the packagesubstrate 210, (ii) bonding the reverse-shingled sub-stack 900 of thedie stack 330 (FIG. 3 ) to the package substrate 210, (iii) bonding thewire segment 332 a to the controller 220 and to the bridging chip 336,and (iv) bonding the wire segment 332 b to each of the dies 250 in thereverse-shingled sub-stack 900 and to the bridging chip 336. Preparingthe package substrate 210 may include bonding the connectors 212 to thepackage substrate 210 at the bond pads on the lower surface of thepackage substrate 210 and bonding the controller 220 to the uppersurface of the package substrate 210. Bonding the reverse-shingledsub-stack 900 to the package substrate 210 may first include bonding alowermost die 250 (e.g., a bottom or first die) to the upper surface ofthe package substrate 210 adjacent to the controller 220.

Next, the dies 250 may be consecutively bonded to the shingled sub-stack900 offset from the lowermost or a previous die 250 in the seconddirection, exposing the bond pad of the lowermost or the previous die250. After all dies 250 have been bonded to the package 300, thebridging chip 336 may be bonded to an uppermost die 250 (e.g., a top orlast die) offset from the uppermost die 250 in the second direction andexposing the bond pad of the uppermost die 250. After the bridging chip336 has been bonded to the uppermost die 250, forming thereverse-shingled sub-stack 900, the wire segments 332 a, 332 b may beformed. The wire segment 332 a may connect the controller 220 to thesecond end bond pad of the bridging chip 336 and the wire segment 332 bmay connect each die 250 of the sub-stack 900 to the first end bond padof the bridging chip 336, respectively, completing the circuit 332.

FIG. 10 illustrates the package 300 after (i) bonding the shingledsub-stack 1000 of the die stack 340 (FIG. 3 ) to the package substrate210, (ii) bonding the wire segment 342 a to the controller 220 and tothe bridging chip 346, and (iii) bonding the wire segment 342 b to eachof the dies 250 in the shingled sub-stack 1000 and to the bridging chip346. Bonding the shingled sub-stack 1000 to the package substrate 210may first include bonding a lowermost die 250 (e.g., a bottom or firstdie) to the upper surface of the package substrate 210 adjacent to thecontroller 220, opposite the reverse-shingled sub-stack 900. Next, thedies 250 may be consecutively bonded to the shingled sub-stack 1000offset from the lowermost or a previous die 250 in the first direction,exposing the bond pad of the lowermost or the previous die 250.

After all dies 250 of the sub-stack 1000 have been bonded to the package300, the bridging chip 346 may be bonded to an uppermost die 250 (e.g.,a top or last die) offset from the uppermost die 250 in the firstdirection and exposing the bond pad of the uppermost die 250. After thebridging chip 346 has been bonded to the uppermost die 250, forming thereverse-shingled sub-stack 1000, the wire segments 342 a, 342 b may beformed. The wire segment 342 a may connect the controller 220 to thesecond end bond pad of the bridging chip 346 and the wire segment 342 bmay connect each die 250 of the sub-stack 1000 to the first end bond padof the bridging chip 346, respectively, completing the circuit 342.

FIG. 11 illustrates the package 300 after (i) bonding thereverse-shingled sub-stack 1100 of the die stack 340 to the bridgingchip 346, and (ii) bonding the wire 344 from the controller 220 to eachdie 250 of the reverse-shingled sub-stack 1100. Bonding thereverse-shingled sub-stack 1100 to the bridging chip 346 may firstinclude bonding a lowermost die 250 (e.g., a bottom or first die) to theupper surface of the bridging chip 346. The lowermost die 250 may beoffset in the second direction from the second end of the bridging chip346 and offset in the first direction from the second end of thebridging chip 346 (e.g., the lowermost die 250 may be offset from bothends of the bridging chip 346 or generally centered on the bridging chip346). Next, the dies 250 may be consecutively bonded to thereverse-shingled sub-stack 1100 offset from the lowermost or a previousdie 250 in the second direction, exposing the bond pad of the lowermostor the previous die 250. After all dies 250 have been bonded to thepackage 300, forming the reverse-shingled sub-stack 1100, the wire 344may be formed, connecting the controller 220 to the bond pads of eachdie 250 of the sub-stack 1100.

FIG. 12 illustrates the package 300 after (i) bonding the shingledsub-stack 1200 of the die stack 330 to the bridging chip 336, and (ii)bonding the wire 334 from the controller 220 to each die 250 of theshingled sub-stack 1200. Bonding the shingled sub-stack 1200 to thebridging chip 336 may first include bonding a lowermost die 250 (e.g., abottom or first die) to the upper surface of the bridging chip 336. Thelowermost die 250 may be offset in the first direction from the secondend of the bridging chip 336 and offset in the second direction from thefirst end of the bridging chip 336 (e e.g., the lowermost die 250 may beoffset from both ends of the bridging chip 336 or generally centered onthe bridging chip 336). Next, the dies 250 may be consecutively bondedto the shingled sub-stack 1200 offset from the lowermost or a previousdie 250 in the first direction, exposing the bond pad of the lowermostor the previous die 250. After all dies 250 have been bonded to thepackage 300, forming the shingled sub-stack 1200, the wire 334 may beformed, connecting the controller 220 to the bond pads of each die 250of the sub-stack 1200.

FIG. 13 illustrates the package 300 after a molding material has beenapplied over the controller 220 and die stacks 330, 340. The moldingmaterial may be formed by dipping the package 300, die stacks 330, 340first, into a liquid molding material, removing the package 300 from theliquid molding material, and allowing the material to harden. In someembodiments the molding material may be applied over the package 300while the package 300 is upright (as shown in FIG. 13 ). As illustrated,the molding material encases and insulates the upper surface of thepackage substrate 210 and exterior surfaces of the controller 220 andthe dies 250.

FIG. 14 is a flow diagram illustrating a process 1400 for producing atleast the package 200 of FIG. 2 having cross stack bridge bonding inaccordance with some embodiments of the present technology. Theoperations of process 1400 are intended for illustrative purposes andare non-limiting. In some embodiments, for example, the process 1400 canbe accomplished with one or more additional operations not described,without one or more operations described, or with the operations in analternative order. As shown in FIG. 14 , the process may include:providing a package substrate (process portion 1402); forming a firstshingled sub-stack at the package substrate (process portion 1404);forming a second shingled sub-stack at the package substrate (processportion 1406); forming a second reverse-shingled sub-stack on the secondshingled sub-stack (process portion 1408); and forming a firstreverse-shingled sub-stack on the first shingled sub-stack (processportion 1410).

In process portion 1402, a package substrate can be provided. In processportion 1404, a first shingled sub-stack can be formed at the packagesubstrate. Forming the first shingled sub-stack can comprise (i) bondinga first die of the first shingled sub-stack to the package substrate andconsecutive dies to the first die with each consecutive die above andshingled relative to a previous die, and (ii) bonding a wire between thefirst die and each consecutive die of the first shingled sub-stack.

In process portion 1406, a second shingled sub-stack can be formed atthe package substrate. Forming the second shingled sub-stack at thepackage substrate can comprise (i) bonding a first die of the secondshingled sub-stack to the package substrate and consecutive dies to thefirst die with each consecutive die above and shingled relative to aprevious die, (ii) bonding a first bridging chip to a last die of theconsecutive dies of the second shingled sub-stack, (iii) bonding a wirebetween the package substrate and the first die, each consecutive die,and the first bridging chip of the second shingled sub-stack, and (iv)bonding a wire between the first bridging chip and the first shingledsub-stack.

In process portion 1408, a second reverse-shingled sub-stack can beformed on the second shingled sub-stack. Forming can comprise (i)bonding a first die of the second reverse-shingled sub-stack to thefirst bridging chip and consecutive dies to the first die with eachconsecutive die above and reverse-shingled relative to a previous die,and (ii) bonding a wire between the first die and each consecutive dieof the second reverse-shingled sub-stack.

In process portion 1410, a first reverse-shingled sub-stack can beformed on the first shingled sub-stack. Forming can comprise (i) bondinga first die of the first reverse-shingled sub-stack and consecutive diesto the first die with each die above and reverse-shingled relative to aprevious die, (ii) bonding a second bridging chip to a last die of theconsecutive dies of the first reverse-shingled sub-stack, (iii) bondinga wire between the package substrate and the first die, each consecutivedie, and the second bridging chip of the first reverse-shingledsub-stack, and (iv) bonding a wire between the second bridging chip andthe second reverse-shingled sub-stack.

FIG. 15 is a flow diagram illustrating a process 1500 for producing atleast the package 300 of FIG. 3 having through stack bridge bonding inaccordance with some embodiments of the present technology. Theoperations of process 1500 are intended for illustrative purposes andare non-limiting. In some embodiments, for example, the process 1500 canbe accomplished with one or more additional operations not described,without one or more operations described, or with the operations in analternative order. As shown in FIG. 15 , the process may include:providing a package substrate having a controller (process portion1502); forming a shingled die stack at the package substrate, theshingled die stack having a first die, consecutive dies, and a bridgingchip (process portion 1504); bonding a first wire segment between thecontroller and a first end of the bridging chip (process portion 1506);bonding a second wire segment between a second end of the bridging chip,the first die of the shingled die stack, and each consecutive die of theshingled die stack (process portion 1508); forming a reverse-shingleddie stack on the shingled die stack, the reverse-shingled die stackhaving a second die, consecutive dies, and a second bridging chip(process portion 1510); and bonding a third wire segment between thecontroller, the second die of the reverse-shingled die stack, and eachconsecutive die of the reverse-shingled die stack (process portion1512).

In process portion 1502, a package substrate having a controller can beprovided. In process portion 1504, forming the shingled die stack at thepackage substrate can comprise (i) bonding a first die to the packagesubstrate and consecutive dies to the first die with each consecutivedie above and shingled relative to a previous die, and (ii) bonding thebridging chip to a last die of the consecutive dies of the shingled diestack. In process portion 1506, the first wire segment can be bondedbetween the controller and the first end of the bridging chip. Inprocess portion 1508, the second wire segment can be bonded between thesecond end of the bridging chip, the first die of the shingled diestack, and each consecutive die of the shingled die stack. In processportion 1510, forming the reverse-shingled die stack can comprise (i)bonding the second die to the bridging chip, and (ii) bondingconsecutive dies to the second die with each consecutive die above andreverse-shingled relative to a previous die. In process portion 1512,the third wire segment can be bonded between the controller, the seconddie of the reverse-shingled die stack, and each consecutive die of thereverse-shingled die stack.

From the foregoing, it will be appreciated that specific embodiments ofthe technology have been described herein for purposes of illustration,but well-known structures and functions have not been shown or describedin detail to avoid unnecessarily obscuring the description of theembodiments of the technology. To the extent any material incorporatedherein by reference conflicts with the present disclosure, the presentdisclosure controls. Where the context permits, singular or plural termsmay also include the plural or singular term, respectively. Moreover,unless the word “or” is expressly limited to mean only a single itemexclusive from the other items in reference to a list of two or moreitems, then the use of “or” in such a list is to be interpreted asincluding (a) any single item in the list, (b) all of the items in thelist, or (c) any combination of the items in the list. Furthermore, asused herein, the phrase “and/or” as in “A and/or B” refers to A alone, Balone, and both A and B. Additionally, the terms “comprising,”“including,” “having,” and “with” are used throughout to mean includingat least the recited feature(s) such that any greater number of the samefeatures and/or additional types of other features are not precluded.

From the foregoing, it will also be appreciated that variousmodifications may be made without deviating from the disclosure or thetechnology. For example, one of ordinary skill in the art willunderstand that various components of the technology can be furtherdivided into subcomponents, or that various components and functions ofthe technology may be combined and integrated. In addition, certainaspects of the technology described in the context of particularembodiments may also be combined or eliminated in other embodiments.Furthermore, although advantages associated with certain embodiments ofthe technology have been described in the context of those embodiments,other embodiments may also exhibit such advantages, and not allembodiments need necessarily exhibit such advantages to fall within thescope of the technology. Accordingly, the disclosure and associatedtechnology can encompass other embodiments not expressly shown ordescribed herein.

We claim:
 1. A semiconductor device package, comprising: a packagesubstrate including an upper surface; a controller at the upper surface;a die stack at the upper surface including multiple dies, having: ashingled sub-stack of semiconductor dies, a reverse-shingled sub-stackof semiconductor dies, and a bridging chip bonded between the shingledsub-stack and the reverse-shingled sub-stack, and having an internaltrace; a first wire segment between the controller and a first end ofthe bridging chip; a second wire segment between a second end of thebridging chip and each semiconductor die of the shingled sub-stack,wherein the internal trace electrically couples the first and secondwire segments; and a third wire segment bonded to the controller andfurther bonded to each semiconductor die of the reverse-shingledsub-stack.
 2. The semiconductor device package of claim 1, wherein thecontroller comprises a first controller channel, and wherein the firstcontroller channel corresponds to the semiconductor dies of the shingledsub-stack.
 3. The semiconductor device package of claim 1, wherein thedie stack is on a first side of the controller, and wherein thesemiconductor device package further comprises: a second die stack atthe upper surface on a second side of the controller opposite the firstside, the second die stack including multiple dies and having: a secondreverse-shingled sub-stack of semiconductor dies, a second shingledsub-stack of semiconductor dies, and a second bridging chip bondedbetween the second reverse-shingled sub-stack and the second shingledsub-stack, and having a second internal trace; a fourth wire segmentbetween the controller and the second bridging chip; a fifth wiresegment between a second end of the second bridging chip and eachsemiconductor die of the second reverse-shingled sub-stack, wherein thesecond internal trace electrically couples the fourth and fifth wiresegments; and a sixth wire segment bonded between the controller andeach semiconductor die of the second shingled sub-stack.
 4. Thesemiconductor device package of claim 3, wherein the controllercomprises a second controller channel, and wherein the second controllerchannel corresponds to the semiconductor dies of the secondreverse-shingled sub-stack.
 5. The semiconductor device package of claim1 further comprising: a second shingled sub-stack, including: a secondbridging chip bonded to an uppermost die of the reverse-shingledsub-stack, and a first semiconductor die bonded to the second bridgingchip and consecutive dies bonded above and shingled relative to thefirst die or to a previously bonded die.
 6. The semiconductor devicepackage of claim 1, wherein a region of the upper surface opposite thedie stack from the controller is free of any bond pads to which a wiresegment is bonded.
 7. The semiconductor device package of claim 1,wherein the bridging chip comprises: an upper surface; a first exposedarea of the upper surface at the first end; a second exposed area of theupper surface at the second end; and a bond pad at each of the firstexposed area and the second exposed area, wherein the internal traceelectrically connects the bond pads.
 8. The semiconductor device packageof claim 1, wherein the bridging chip is a semiconductor die.
 9. Thesemiconductor device package of claim 1, wherein at least a portion ofthe bridging chip is vertically aligned with the controller.
 10. Asemiconductor device package, comprising: a package substrate includingan upper surface; a controller at the upper surface; a shingled diestack at the upper surface, including: multiple semiconductor dies, afirst bridging chip bonded to at least one of the semiconductor dies, afirst wire segment bonded between the controller and a first end of thefirst bridging chip, and a second wire segment bonded between a secondend of the first bridging chip and each semiconductor die of theshingled die stack; and a reverse-shingled die stack at the uppersurface, including: multiple semiconductor dies, a second bridging chipbonded to at least one of the semiconductor dies, a third wire segmentbonded between the controller and a first end of the second bridgingchip, and a fourth wire segment bonded between a second end of thesecond bridging chip and each semiconductor die of the reverse-shingleddie stack.
 11. The semiconductor device package of claim 10, wherein amold material is at the upper surface of the package substrate and atleast partially encasing the controller, the shingled die stack, and thereverse-shingled die stack.
 12. The semiconductor device package ofclaim 10, wherein the shingled die stack is on a first side of thecontroller and the reverse-shingled die stack is on a second side of thecontroller, wherein the second side is opposite the first side.
 13. Thesemiconductor device package of claim 10, wherein the controllercomprises a first controller channel, and wherein the first controllerchannel corresponds to the semiconductor dies of the shingled die stack.14. The semiconductor device package of claim 10 further comprising athird die stack at the upper surface, including: multiple semiconductordies, one of which being an uppermost die, a third bridging chip bondedto the uppermost die, a fifth wire segment bonded between the controllerand a first end of the third bridging chip, and a sixth wire segmentbonded between a second end of the third bridging chip and eachsemiconductor die of the third die stack.
 15. The semiconductor devicepackage of claim 10, wherein a first region of the upper surfaceopposite the shingled die stack from the controller and a second regionof the upper surface opposite the reverse-shingled die stack from thecontroller are free of any bond pads to which a wire segment is bonded.16. The semiconductor device package of claim 10 further comprising adedicated wire between the upper surface of the package substrate andthe controller.
 17. The semiconductor device package of claim 10,wherein the shingled die stack further includes: a fifth wire segmentbonded between the controller and the first end of the first bridgingchip, and a sixth wire segment bonded between the second end of thefirst bridging chip and each semiconductor die of the shingled diestack.
 18. The semiconductor device package of claim 10, wherein thefirst and second bridging chip each comprise: an upper surface; a firstexposed area of the upper surface at the first end; a second exposedarea of the upper surface at the second end; a bond pad at each of thefirst exposed area and the second exposed area; and an internal traceelectrically connecting the bond pads.
 19. The semiconductor devicepackage of claim 10, wherein a one of the semiconductor dies of theshingled is an uppermost die, and wherein the first bridging chip isbonded to the uppermost die.
 20. A method of manufacturing asemiconductor package, comprising: providing a package substrate havinga controller; forming a shingled die stack at the package substrate,forming comprising: bonding a first die to the package substrate andconsecutive dies to the first die with each consecutive die above andshingled relative to a previous die, and bonding a bridging chip to alast die of the consecutive dies; bonding a first wire segment betweenthe controller and a first end of the bridging chip; bonding a secondwire segment between a second end of the bridging chip, the first die ofthe shingled die stack, and each consecutive die of the shingled diestack; forming a reverse-shingled die stack on the shingled die stack,forming comprising: bonding a second die to the bridging chip, andbonding consecutive dies to the second die with each consecutive dieabove and reverse-shingled relative to a previous die; and bonding athird wire segment between the controller, the second die of thereverse-shingled die stack, and each consecutive die of thereverse-shingled die stack.